Ion Implantation and Activation

Volume 1


Kunihiro Suzuki

DOI: 10.2174/97816080578181130101
eISBN: 978-1-60805-781-8, 2013
ISBN: 978-1-60805-782-5
ISSN: 2589-2940 (Print)
ISSN: 2215-0005 (Online)

Indexed in: EBSCO.

Ion Implantation and Activation – Volume 1 presents the derivation process of ...[view complete introduction]
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Quasi Crystal LSS Theory

- Pp. 376-398 (23)

Kunihiro Suzuki


The moments associated with the peak region were evaluated with the extended Lindhard-Scharff-Schiott (LSS) theory. The theory was further extended to that for moments of profiles in crystalline substrates. The channeling length was related to the maximum range that is associated with electron stopping power only. The shape of the channeling tail and the channeling dose were expressed in an empirical way but with a universal form. The theory was successfully applied to the profiles in Si<sub>1-x</sub>Ge<sub>x</sub> substrates.

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