Chapter 10

Quasi Crystal LSS Theory

Kunihiro Suzuki

Abstract

The moments associated with the peak region were evaluated with the extended Lindhard-Scharff-Schiott (LSS) theory. The theory was further extended to that for moments of profiles in crystalline substrates. The channeling length was related to the maximum range that is associated with electron stopping power only. The shape of the channeling tail and the channeling dose were expressed in an empirical way but with a universal form. The theory was successfully applied to the profiles in Si<sub>1-x</sub>Ge<sub>x</sub> substrates.

Total Pages: 376-398 (23)

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