Ion Implantation and Activation

Volume 1


Kunihiro Suzuki

DOI: 10.2174/97816080578181130101
eISBN: 978-1-60805-781-8, 2013
ISBN: 978-1-60805-782-5
ISSN: 2589-2940 (Print)
ISSN: 2215-0005 (Online)

Indexed in: EBSCO.

Ion Implantation and Activation – Volume 1 presents the derivation process of ...[view complete introduction]
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Lateral Distribution

- Pp. 266-301 (36)

Kunihiro Suzuki


An analytical model with lateral straggling parameters was developed to describe the tilt dependence of ion-implantation profiles. There are three parameters associated with depth-dependent lateral straggling into the model. On the basis of comparison between experimental and analytical data, a database of ion-implantation profiles that includes lateral-straggling parameters have established. The data with tilt 0° were evaluated using off angle substrates.

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