Author: Terence K.S. Wong

Semiconductor Strain Metrology: Principles and Applications

eBook: US $59 Special Offer (PDF + Printed Copy): US $136
Printed Copy: US $107
Library License: US $236
ISBN: 978-1-60805-554-8 (Print)
ISBN: 978-1-60805-359-9 (Online)
Year of Publication: 2012
DOI: 10.2174/97816080535991120101

Introduction

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This e-book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this e-book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.

Foreword

- Pp. i
Rakesh Kumar
Download Free

Preface

- Pp. ii
Terence K.S. Wong
Download Free

PART 1: INTRODUCTION

- Pp. 3
Terence K.S. Wong

PDF Price: $15

Purchase Chapter

Introduction to Strain Metrology for Semiconductors

- Pp. 4-14 (11)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Strain, Stress and Semiconductor Properties

- Pp. 15-26 (12)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

PART 2: OPTICAL STRAIN METROLOGY

- Pp. 27
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Variable Angle Spectroscopic Ellipsometry

- Pp. 28-37 (10)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Photoreflectance Method

- Pp. 38-49 (12)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Micro-Raman Spectroscopy

- Pp. 50-58 (9)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

PART 3: ELECTRON BEAM STRAIN METROLOGY

- Pp. 59
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Cathodoluminescence Method

- Pp. 60-69 (10)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Nano-Beam Diffraction and Convergent Beam Electron Diffraction

- Pp. 70-79 (10)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Dark-Field Electron Holographic Moire Method

- Pp. 80-89 (10)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

PART 4: EMERGING STRAIN METROLOGY

- Pp. 90
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Tip-Enhanced Raman Spectroscopy

- Pp. 91-101 (11)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Atomic Force Microscopy Digital Image Correlation Method

- Pp. 102-111 (10)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Synchrotron X-ray Micro/Nanodiffraction Methods

- Pp. 112-125 (14)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Conclusion and Outlook

- Pp. 126-128 (3)
Terence K.S. Wong

PDF Price: $15

View Abstract Purchase Chapter

Appendix 1

- Pp. 129-131 (3)
Terence K.S. Wong

PDF Price: $15

Purchase Chapter

Index

- Pp. 132-136 (5)
Terence K.S. Wong
Download Free

RELATED BOOKS

.Modern Intelligent Instruments - Theory and Application.
.Bipolar Transistor and MOSFET Device Models.
.Electromagnetic Interference Issues in Power Electronics and Power Systems.
.Electromagnetics for Engineering Students: Part 1.