Chapter 4

Sputtering of Thin Films

Paolo Rava


Sputtering is one of the most widely used techniques for deposition of thin films. This chapter reviews the physical foundations of sputtering in a plasma and its application to the deposition of thin films. Different sputtering techniques are described and their advantages and disadvantages are highlighted.

Total Pages: 58-80 (23)

Download Free  Book Details


.Solar Chimney Power Plants: Numerical Investigations and Experimental Validation.
.Renewable Energy Engineering: Solar, Wind, Biomass, Hydrogen and Geothermal Energy Systems.
.Application of Flexible AC Transmission System Devices in Wind Energy Conversion Systems.
.Microalgae as a Source of Bioenergy: Products, Processes and Economics.