Ion Implantation and Activation

Volume 3


Kunihiro Suzuki

DOI: 10.2174/97816080579241130301
eISBN: 978-1-60805-792-4, 2013
ISBN: 978-1-60805-793-1
ISSN: 2589-2940 (Print)
ISSN: 2215-0005 (Online)

Indexed in: EBSCO.

Ion Implantation and Activation – Volume 3 presents the derivation process of related models in a comprehensive step ...[view complete introduction]
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Analytical Diffusion Profiles Under Various Boundary Conditions

- Pp. 128-204 (77)

Kunihiro Suzuki


We can obtain analytical models for impurity diffusion profiles in some specific cases, although it is difficult to solve this in general. We first show various analytical models assuming constant diffusion coefficients, and then present the models with variable diffusion coefficients. We further display analytical models for two-dimensional diffusion profiles, and profiles for multi-layers.

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