Ion Implantation and Activation

Volume 3


Kunihiro Suzuki

DOI: 10.2174/97816080579241130301
eISBN: 978-1-60805-792-4, 2013
ISBN: 978-1-60805-793-1
ISSN: 2589-2940 (Print)
ISSN: 2215-0005 (Online)

Indexed in: EBSCO.

Ion Implantation and Activation – Volume 3 presents the derivation process of related models in a comprehensive step ...[view complete introduction]
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Experimental Data Associated with Transient Diffusion

- Pp. 56-82 (27)

Kunihiro Suzuki


We should determine various ambiguous physical parameters of the transient diffusion (TED) models associated with paring to understand TED fully. On the other hand, we can only obtain total impurity concentration profile data which lack paring information. We should guess the paring parameters from total redistributed impurity concentration profiles. The difficulty that fundamental data can only be evaluated at low-temperature regions also exist, that is, we cannot simply relate the profiles to a target temperature set at practical temperatures of about 1000°C. This means that the TED starts and ends in the ramping process at the target temperature. Therefore, we show TED data at low temperatures, and clarify its prominent features. The characteristics at high temperatures can be evaluated by extrapolating the parameter values.

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