Ion Implantation and Activation

Volume 1


Kunihiro Suzuki

DOI: 10.2174/97816080578181130101
eISBN: 978-1-60805-781-8, 2013
ISBN: 978-1-60805-782-5
ISSN: 2589-2940 (Print)
ISSN: 2215-0005 (Online)

Indexed in: EBSCO.

Ion Implantation and Activation – Volume 1 presents the derivation process of ...[view complete introduction]
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Parameter Extraction for Analytical Ion Implantation Profile Model

- Pp. 241-265 (25)

Kunihiro Suzuki


Experimental data and Monte Carlo data provide data sources for constructing ion implantation profile database. We need to extract parameters for various analytical functions from the profile data. We showed that, for the expression of ion implantation profiles, there are many local minimum values sets for the third and fourth moment parameters of γ and β for the Pearson function that comprises the standard dual Pearson and tail functions. It was proposed to use a joined tail function as a mediate function to extract γ and β , and demonstrated that this enables us to extract the parameters uniquely. Other parameters associated with channeling phenomena can also be simply and uniquely extracted by the procedure.

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