Ion Implantation and Activation

Volume 1


Kunihiro Suzuki

DOI: 10.2174/97816080578181130101
eISBN: 978-1-60805-781-8, 2013
ISBN: 978-1-60805-782-5
ISSN: 2589-2940 (Print)
ISSN: 2215-0005 (Online)

Indexed in: EBSCO.

Ion Implantation and Activation – Volume 1 presents the derivation process of ...[view complete introduction]
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The Other Analytical Model for Ion Implantation Profiles: Edgeworth Polynomial

- Pp. 223-240 (18)

Kunihiro Suzuki


Pearson function is commonly used to express ion implantation profiles based on its four moments. Pearson function is not the unique one that uses the given four moments. Edgeworth polynomial is a function that is also generated using the four moments or more. We explain the model in this section, and express some experimental data with this model.

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