Chapter 6

The Other Analytical Model for Ion Implantation Profiles: Edgeworth Polynomial

Kunihiro Suzuki


Pearson function is commonly used to express ion implantation profiles based on its four moments. Pearson function is not the unique one that uses the given four moments. Edgeworth polynomial is a function that is also generated using the four moments or more. We explain the model in this section, and express some experimental data with this model.

Total Pages: 223-240 (18)

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.Ion Implantation and Activation.
.Ion Implantation and Activation.
.Classical Mechanics and Quantum Mechanics: An Historic-Axiomatic Approach.