Chapter 2

Physics of Ion Implantation

Kunihiro Suzuki


The interactions between incident ion and substrate atoms are classical physical subjects. Ions lose its initial accelerated energy through the interaction between electron cloud and nuclei. The process is described with fundamental atomic properties such as atomic number and mass. Therefore, the model accommodates any combination of incident atom as well as the substrate composed of various kinds of atoms. We show the detail derivation process of nuclei and electronic stopping power models.

Total Pages: 8-91 (84)

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.Ion Implantation and Activation.
.Ion Implantation and Activation.
.Classical Mechanics and Quantum Mechanics: An Historic-Axiomatic Approach.