Ion Implantation and Activation

Volume 1


Kunihiro Suzuki

DOI: 10.2174/97816080578181130101
eISBN: 978-1-60805-781-8, 2013
ISBN: 978-1-60805-782-5
ISSN: 2589-2940 (Print)
ISSN: 2215-0005 (Online)

Indexed in: EBSCO.

Ion Implantation and Activation – Volume 1 presents the derivation process of ...[view complete introduction]
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Physics of Ion Implantation

- Pp. 8-91 (84)

Kunihiro Suzuki


The interactions between incident ion and substrate atoms are classical physical subjects. Ions lose its initial accelerated energy through the interaction between electron cloud and nuclei. The process is described with fundamental atomic properties such as atomic number and mass. Therefore, the model accommodates any combination of incident atom as well as the substrate composed of various kinds of atoms. We show the detail derivation process of nuclei and electronic stopping power models.

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